Welcome to CIBA

Materials Research

The materials characterization group at CIBA mainly works toward the development and application of ion-beam based analytical and microscopic techniques:

  • Ion Beam Analysis and Nuclear Microscopy, including RBS, PIXE, ERDA, IBIC and related topics.

  • Development of High Resolution Rutherford Backscattering (HRBS) for ultrathin film technology in the Angstrom range.

  • Application of these techniques to materials science, microelectronics engineering and the life sciences.

  • As an example, currently work on Channeling Contrast Microscopy and High Resolution RBS characterization of GeSn virtual substrates is ongoing.

The 45 degree beamline at CIBA, a general purpose nuclear microscope

Positioning of samples at the high resolution RBS chamber


Under construction


Under construction

Two Photon Lithography

Under construction


Under construction